Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer

التفاصيل البيبلوغرافية
العنوان: Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer
المؤلفون: Hopcroft, M.A., Agarwal, M., Park, K.K., Kim, B., Jha, C.M., Candler, R.N., Yama, G., Murmann, B., Kenny, T.W.
المصدر: 19th IEEE International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. :222-225 2006
Relation: 19th IEEE International Conference on Micro Electro Mechanical Systems
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780394755
9780780394759
تدمد:10846999
DOI:10.1109/MEMSYS.2006.1627776