مؤتمر
Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer
العنوان: | Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer |
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المؤلفون: | Hopcroft, M.A., Agarwal, M., Park, K.K., Kim, B., Jha, C.M., Candler, R.N., Yama, G., Murmann, B., Kenny, T.W. |
المصدر: | 19th IEEE International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. :222-225 2006 |
Relation: | 19th IEEE International Conference on Micro Electro Mechanical Systems |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780394755 9780780394759 |
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تدمد: | 10846999 |
DOI: | 10.1109/MEMSYS.2006.1627776 |