Effect of Chemical Mechanical Polish Process on Low-Temperature Poly-Sige Thin-Film Transistors

التفاصيل البيبلوغرافية
العنوان: Effect of Chemical Mechanical Polish Process on Low-Temperature Poly-Sige Thin-Film Transistors
المؤلفون: Ming-Shan Shieh, Chih-Yang Chen, Yuan-Jiun Hsu, Shen-De Wang, Tan-Fu Lei
المصدر: 2006 IEEE International Reliability Physics Symposium Proceedings Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International. :711-712 Mar, 2006
Relation: 2006 IEEE International Reliability Physics Symposium Proceedings
قاعدة البيانات: IEEE Xplore Digital Library