Trajectory Control of MEMS Lateral Comb Resonators Under Faulty Conditions

التفاصيل البيبلوغرافية
العنوان: Trajectory Control of MEMS Lateral Comb Resonators Under Faulty Conditions
المؤلفون: Izadian, Afshin, Hornak, Lawrence A., Famouri, Parviz
المصدر: 2007 American Control Conference American Control Conference, 2007. ACC '07. :3198-3203 Jul, 2007
Relation: 2007 American Control Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:1424409888
9781424409884
1424409896
9781424409891
تدمد:07431619
23785861
DOI:10.1109/ACC.2007.4282753