High Performance Sub-40 nm Bulk CMOS with Dopant Confinement Layer (DCL) technique as a Strain Booster

التفاصيل البيبلوغرافية
العنوان: High Performance Sub-40 nm Bulk CMOS with Dopant Confinement Layer (DCL) technique as a Strain Booster
المؤلفون: Ohta, H., Tamura, N., Fukutome, H., Tajima, M., Okabe, K., Hatada, A., Ikeda, K., Ohkoshi, K., Mori, T., Sukegawa, K., Satoh, S., Sugii, T.
المصدر: 2007 IEEE International Electron Devices Meeting Electron Devices Meeting, 2007. IEDM 2007. IEEE International. :289-292 Dec, 2007
Relation: 2007 IEEE International Electron Devices Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424415076
9781424415083
تدمد:01631918
2156017X
DOI:10.1109/IEDM.2007.4418925