مؤتمر
Low resistive tungsten dual polymetal gate process for high speed and high density memory devices
| العنوان: | Low resistive tungsten dual polymetal gate process for high speed and high density memory devices |
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| المؤلفون: | Yong Soo Kim, Kwan-Yong Lim, Min-Gyu Sung, Soo-Hyun Kim, Hong-Seon Yang, Heung-Jae Cho, Se-Aug Jang, Jae-Geun Oh, Kwangok Kim, Young-Kyun Jung, Tae-Woo Jung, Choon-Hwan Kim, Doek-Won Lee, Won Kim, Young-Hoon Kim, Kang-Sik Choi, Tae-Kyung Oh, Yun-Taek Hwang, Seung-Ho Pyi, Ja-chun Ku, Jin-Woong Kim |
| المصدر: | ESSDERC 2007 - 37th European Solid State Device Research Conference Solid State Device Research Conference, 2007. ESSDERC 2007. 37th European. :259-262 Sep, 2007 |
| Relation: | ESSDERC 2007 - 37th European Solid State Device Research Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424411238 9781424411245 |
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| تدمد: | 19308876 23786558 |
| DOI: | 10.1109/ESSDERC.2007.4430927 |