Special Section on the Advanced Semiconductor Manufacturing Conference 2007 (ASMC 2007)

التفاصيل البيبلوغرافية
العنوان:	Special Section on the Advanced Semiconductor Manufacturing Conference 2007 (ASMC 2007)
المؤلفون:	Patterson, O. D., Melzner, H., Beeg, T.
المصدر:	IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 21(3):306-307 Aug, 2008
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
تدمد:	08946507 15582345
DOI:	10.1109/TSM.2008.2001202