دورية أكاديمية
Special Section on the Advanced Semiconductor Manufacturing Conference 2007 (ASMC 2007)
العنوان: | Special Section on the Advanced Semiconductor Manufacturing Conference 2007 (ASMC 2007) |
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المؤلفون: | Patterson, O. D., Melzner, H., Beeg, T. |
المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 21(3):306-307 Aug, 2008 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 08946507 15582345 |
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DOI: | 10.1109/TSM.2008.2001202 |