Methods and tools for semiconductor annealing and silicon thin film crystallization using solid state lasers

التفاصيل البيبلوغرافية
العنوان: Methods and tools for semiconductor annealing and silicon thin film crystallization using solid state lasers
المؤلفون: Oesterlin, Peter, Burghardt, Berthold, Kahlert, Hans-Juergen, Heglin, L. Michael
المصدر: 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on. :1-1 May, 2006
Relation: 2006 Conference on Lasers & Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781557528131
تدمد:21609004
DOI:10.1109/CLEO.2006.4628853