مؤتمر
Polyoxide grown on metal induced re-crystallized polysilicon combined with CF4 plasma
| العنوان: | Polyoxide grown on metal induced re-crystallized polysilicon combined with CF4 plasma |
|---|---|
| المؤلفون: | Chyuan-Haur Kao, Lee, C. H., Chan, T. C., Chiu, J. S., Chen, C. S., Chen, K. S., Chuang, C. S., Chen, S. K. |
| المصدر: | 2008 9th International Conference on Solid-State and Integrated-Circuit Technology Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on. :1170-1172 Oct, 2008 |
| Relation: | 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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