مؤتمر
Atomic Layer Deposition (ALD) Tungsten NEMS Devices via a Novel Top-Down Approach
| العنوان: | Atomic Layer Deposition (ALD) Tungsten NEMS Devices via a Novel Top-Down Approach |
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| المؤلفون: | Davidson, B.D., Chang, Y.J., Seghete, D., George, S.M., Bright, V.M. |
| المصدر: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on. :120-123 Jan, 2009 |
| Relation: | 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424429776 9781424429783 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2009.4805333 |