Defect reduction in large lattice mismatch epitaxial growth through block copolymer full wafer patterning

التفاصيل البيبلوغرافية
العنوان: Defect reduction in large lattice mismatch epitaxial growth through block copolymer full wafer patterning
المؤلفون: Kuech, T.F., Jha, Smita, Kuan, T.S., Babcock, S.E., Mawst, L. J.
المصدر: 2009 IEEE International Conference on Indium Phosphide & Related Materials Indium Phosphide & Related Materials, 2009. IPRM '09. IEEE International Conference on. :63-64 May, 2009
Relation: 2009 IEEE International Conference on Indium Phosphide & Related Materials (IPRM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424434329
9781424434336
تدمد:10928669
DOI:10.1109/ICIPRM.2009.5012416