مؤتمر
A novel 3D flexible parylene-metal structure fabrication technique
| العنوان: | A novel 3D flexible parylene-metal structure fabrication technique |
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| المؤلفون: | Xianju Huang, Yu Tang, Renxin Wang, Chuang Qian, Wei Wang, Zhihong Li |
| المصدر: | 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on. :907-910 Jan, 2009 |
| Relation: | 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424446292 9781424446308 |
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| DOI: | 10.1109/NEMS.2009.5068721 |