مؤتمر
Correspondence relation between [N-H]/[Si-H] ratio and their optical loss properties in silicon nitride thin films
| العنوان: | Correspondence relation between [N-H]/[Si-H] ratio and their optical loss properties in silicon nitride thin films |
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| المؤلفون: | Mao, S.C., Xu, Y.L., Lu, G. |
| المصدر: | 2009 4th IEEE Conference on Industrial Electronics and Applications Industrial Electronics and Applications, 2009. ICIEA 2009. 4th IEEE Conference on. :3319-3322 May, 2009 |
| Relation: | 2009 4th IEEE Conference on Industrial Electronics and Applications (ICIEA) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424427994 9781424428007 |
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| تدمد: | 21562318 21582297 |
| DOI: | 10.1109/ICIEA.2009.5138817 |