دورية أكاديمية
In-line Inspection Impact on Cycle Time and Yield
| العنوان: | In-line Inspection Impact on Cycle Time and Yield |
|---|---|
| المؤلفون: | Tirkel, I., Reshef, N., Rabinowitz, G. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 22(4):491-498 Nov, 2009 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
|---|---|
| DOI: | 10.1109/TSM.2009.2031779 |