Transparent conductive IZO films prepared by atomic layer deposition using DEZn/TMIn and N2O

التفاصيل البيبلوغرافية
العنوان: Transparent conductive IZO films prepared by atomic layer deposition using DEZn/TMIn and N2O
المؤلفون: Chi-Ying Hsiao, Jing-Hsung Yang, Jyh-Rong Gong, Dong-Yuan Lyu, Tai-Yuan Lin, Cheng-Tao Lu, Der-Yuh Lin
المصدر: 2010 3rd International Nanoelectronics Conference (INEC) Nanoelectronics Conference (INEC), 2010 3rd International. :1337-1338 Jan, 2010
Relation: 2010 IEEE 3rd International Nanoelectronics Conference (INEC)
قاعدة البيانات: IEEE Xplore Digital Library