مؤتمر
The effect of X-ray irradiation on the novella type photoresist
| العنوان: | The effect of X-ray irradiation on the novella type photoresist |
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| المؤلفون: | Hsin-Chiang You, Shao-Hui Shieh, Shiang-Jun Zhang, Fu-Hsiang Ko, Hsiung-Min Lin, Shyh-Chang Tsaur, Chin-Che Lin |
| المصدر: | 2010 3rd International Nanoelectronics Conference (INEC) Nanoelectronics Conference (INEC), 2010 3rd International. :1063-1063 Jan, 2010 |
| Relation: | 2010 IEEE 3rd International Nanoelectronics Conference (INEC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424435432 9781424435449 |
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| تدمد: | 21593523 21593531 |
| DOI: | 10.1109/INEC.2010.5425037 |