Thermal microtransducers by CMOS technology combined with micromachining

التفاصيل البيبلوغرافية
العنوان: Thermal microtransducers by CMOS technology combined with micromachining
المؤلفون: Baltes, H., Moser, D., Lenggenhager, R., Brand, O.
المصدر: ESSDERC '91: 21st European Solid State Device Research Conference Solid State Device Research Conference, 1991. ESSDERC '91. 21st European. :419-422 Sep, 1991
Relation: Proceedings of the 21st European Solid State Device Research Conference - ESSDERC '91
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0444890661
9780444890665
DOI:10.1016/0167-9317(91)90255-C