مؤتمر
Thermal microtransducers by CMOS technology combined with micromachining
العنوان: | Thermal microtransducers by CMOS technology combined with micromachining |
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المؤلفون: | Baltes, H., Moser, D., Lenggenhager, R., Brand, O. |
المصدر: | ESSDERC '91: 21st European Solid State Device Research Conference Solid State Device Research Conference, 1991. ESSDERC '91. 21st European. :419-422 Sep, 1991 |
Relation: | Proceedings of the 21st European Solid State Device Research Conference - ESSDERC '91 |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0444890661 9780444890665 |
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DOI: | 10.1016/0167-9317(91)90255-C |