Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications

التفاصيل البيبلوغرافية
العنوان: Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications
المؤلفون: Matvejev, V., De Tandt, C., Ranson, W., Stiens, J.
المصدر: 35th International Conference on Infrared, Millimeter, and Terahertz Waves Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on. :1-2 Sep, 2010
Relation: 2010 35th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2010)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424466559
9781424466566
9781424466573
تدمد:21622027
21622035
DOI:10.1109/ICIMW.2010.5612337