Suspended nanochannel in MEMS plate resonator for mass sensing in liquid

التفاصيل البيبلوغرافية
العنوان: Suspended nanochannel in MEMS plate resonator for mass sensing in liquid
المؤلفون: Agache, V., Blanco-Gomez, G., Cochet, M., Caillat, P.
المصدر: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :157-160 Jan, 2011
Relation: 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424496327
9781424496341
تدمد:10846999
DOI:10.1109/MEMSYS.2011.5734385