مؤتمر
Parylene-C as a piezoelectric material
| العنوان: | Parylene-C as a piezoelectric material |
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| المؤلفون: | Kim, Justin Young-Hyun, Cheng, Austin, Tai, Yu-Chong |
| المصدر: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :473-476 Jan, 2011 |
| Relation: | 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781424496327 9781424496341 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2011.5734464 |