مؤتمر
A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas
| العنوان: | A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas |
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| المؤلفون: | de Graaf, G., Wu, Huai-Wen, Wolffenbuttel, R.F. |
| المصدر: | 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on. :1/5-5/5 Apr, 2011 |
| Relation: | 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457701078 9781457701054 9781457701061 |
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| DOI: | 10.1109/ESIME.2011.5765809 |