دورية أكاديمية
A comprehensive study of performance and reliability of P, As, and hybrid As/P nLDD junctions for deep-submicron CMOS logic technology
العنوان: | A comprehensive study of performance and reliability of P, As, and hybrid As/P nLDD junctions for deep-submicron CMOS logic technology |
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المؤلفون: | Nayak, D.K., Ming-Yin Hao, Umali, J., Rakkhit, R. |
المصدر: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 18(6):281-283 Jun, 1997 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 07413106 15580563 |
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DOI: | 10.1109/55.585358 |