مؤتمر
Development of high voltage pulse modulator for plasma source ion implantation
العنوان: | Development of high voltage pulse modulator for plasma source ion implantation |
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المؤلفون: | Park, B., Cho, M., Namkung, W., Lee, S., Park, H., Kim, S., Yoo, H. |
المصدر: | 8th International Conference on Power Electronics - ECCE Asia Power Electronics and ECCE Asia (ICPE & ECCE), 2011 IEEE 8th International Conference on. :3001-3004 May, 2011 |
Relation: | 2011 IEEE 8th International Conference on Power Electronics & ECCE Asia (ICPE 2011- ECCE Asia) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781612849560 9781612849584 9781612849577 |
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تدمد: | 21506078 21506086 |
DOI: | 10.1109/ICPE.2011.5944805 |