Development of high voltage pulse modulator for plasma source ion implantation

التفاصيل البيبلوغرافية
العنوان: Development of high voltage pulse modulator for plasma source ion implantation
المؤلفون: Park, B., Cho, M., Namkung, W., Lee, S., Park, H., Kim, S., Yoo, H.
المصدر: 8th International Conference on Power Electronics - ECCE Asia Power Electronics and ECCE Asia (ICPE & ECCE), 2011 IEEE 8th International Conference on. :3001-3004 May, 2011
Relation: 2011 IEEE 8th International Conference on Power Electronics & ECCE Asia (ICPE 2011- ECCE Asia)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781612849560
9781612849584
9781612849577
تدمد:21506078
21506086
DOI:10.1109/ICPE.2011.5944805