Aggressively scaled high-k last metal gate stack with low variability for 20nm logic high performance and low power applications

التفاصيل البيبلوغرافية
العنوان: Aggressively scaled high-k last metal gate stack with low variability for 20nm logic high performance and low power applications
المؤلفون: Hyun, S., Han, J.-H., Park, H.-B., Na, H.-J., Son, H.J., Lee, H.Y., Hong, H.-S., Lee, H.-L., Song, J., Kim, J.J., Lee, J., Jeong, W.C., Cho, H.J., Seo, K.I., Kim, D.W., Sim, S.P., Kang, S.B., Sohn, D.K., Choi, Siyoung, Kang, Hokyu, Chung, Chilhee
المصدر: 2011 Symposium on VLSI Technology - Digest of Technical Papers VLSI Technology (VLSIT), 2011 Symposium on. :32-33 Jun, 2011
Relation: 2011 IEEE Symposium on VLSI Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424499496
9784863481664
تدمد:07431562
21589682