مؤتمر
Wafer by Wafer Low Dose Rate Qualification in a Production Environment
العنوان: | Wafer by Wafer Low Dose Rate Qualification in a Production Environment |
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المؤلفون: | van Vonno, N. W., Pearce, L. G., Northen, A. L., Touvell, J. R., Brewster, J. C., Gill, J. S., Thomson, E. T., Chesley, P. J., Schettler, D. |
المصدر: | 2011 IEEE Radiation Effects Data Workshop Radiation Effects Data Workshop (REDW), 2011 IEEE. :1-7 Jul, 2011 |
Relation: | 2011 IEEE Radiation Effects Data Workshop (in conjunction with NSREC 2011) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781457712814 |
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تدمد: | 21540519 21540535 |
DOI: | 10.1109/REDW.2010.6062512 |