دورية أكاديمية
Electrical Test Structures for the Characterization of Optical Proximity Correction
| العنوان: | Electrical Test Structures for the Characterization of Optical Proximity Correction |
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| المؤلفون: | Tsiamis, A., Smith, S., McCallum, M., Hourd, A., Stevenson, T., Walton, A. J. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 25(2):162-169 May, 2012 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2011.2181669 |