مؤتمر
The optimization of in-line scanner defect sizing using a circuit's layout and critical area
| العنوان: | The optimization of in-line scanner defect sizing using a circuit's layout and critical area |
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| المؤلفون: | Lee, A., Milor, L., Yung-Tao Lin |
| المصدر: | 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI. :78-83 1997 |
| Relation: | 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780340507 9780780340503 |
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| تدمد: | 10788743 |
| DOI: | 10.1109/ASMC.1997.630710 |