مؤتمر
A precision yaw rate sensor in silicon micromachining
| العنوان: | A precision yaw rate sensor in silicon micromachining |
|---|---|
| المؤلفون: | Lutz, M., Golderer, W., Gerstenmeier, J., Marek, J., Maihofer, B., Mahler, S., Munzel, H., Bischof, U. |
| المصدر: | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Solid-state sensors and actuators Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on. 2:847-850 vol.2 1997 |
| Relation: | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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