مؤتمر
VLSI platform for the monolithic integration of single-crystal Si NEMS capacitive resonators with low-cost CMOS
| العنوان: | VLSI platform for the monolithic integration of single-crystal Si NEMS capacitive resonators with low-cost CMOS |
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| المؤلفون: | Arcamone, J., Savoye, M., Arndt, G., Philippe, J., Marcoux, C., Colinet, E., Duraffourg, L., Magis, T., Laurens, M., Monroy-Aguirre, A., Mazoyer, P., Ancey, P., Robert, P., Ollier, E. |
| المصدر: | 2012 International Electron Devices Meeting Electron Devices Meeting (IEDM), 2012 IEEE International. :15.4.1-15.4.4 Dec, 2012 |
| Relation: | 2012 IEEE International Electron Devices Meeting (IEDM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467348706 9781467348720 9781467348713 |
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| تدمد: | 01631918 2156017X |
| DOI: | 10.1109/IEDM.2012.6479048 |