مؤتمر
Ultra-thin EBL (encapsulated barrier layer) for ferroelectric capacitor
العنوان: | Ultra-thin EBL (encapsulated barrier layer) for ferroelectric capacitor |
---|---|
المؤلفون: | In Seon park, Yeong Kwan Kim, Sang Min Lee, Ju Hyuck Chung, Sang Bom Kang, Chang Soo Park, Cha Young Yoo, Sang In Lee, Moon Yong Lee |
المصدر: | International Electron Devices Meeting. IEDM Technical Digest Electron Devices Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International. :617-620 1997 |
Relation: | International Electron Devices Meeting. IEDM Technical Digest |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780341007 9780780341005 |
---|---|
تدمد: | 01631918 |
DOI: | 10.1109/IEDM.1997.650460 |