Process characterization of thin wafer debonding with thermoplastic materials

التفاصيل البيبلوغرافية
العنوان: Process characterization of thin wafer debonding with thermoplastic materials
المؤلفون: Phommahaxay, Alain, Jourdain, Anne, Verbinnen, Greet, Woitke, Tobias, Stieber, Ralf, Bisson, Peter, Gabriel, Markus, Spiess, Walter, Guerrero, Alice, McCutcheon, Jeremy, Puligadda, Rama, Bex, Pieter, Van den Eede, Axel, Swinnen, Bart, Beyer, Gerald, Miller, Andy, Beyne, Eric
المصدر: 2012 4th Electronic System-Integration Technology Conference Electronic System-Integration Technology Conference (ESTC), 2012 4th. :1-4 Sep, 2012
Relation: 2012 4th Electronic System-Integration Technology Conference (ESTC)
قاعدة البيانات: IEEE Xplore Digital Library