A multi-channel integrated readout circuit chip for small capacitance sensors

التفاصيل البيبلوغرافية
العنوان: A multi-channel integrated readout circuit chip for small capacitance sensors
المؤلفون: He, Xiang, Fritz, Theodore A., Knepper, Ronald W., Mavretic, Anton
المصدر: 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on. :1-6 Apr, 2013
Relation: 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
قاعدة البيانات: IEEE Xplore Digital Library