دورية أكاديمية
Mechanical Response of Silicon MEMS Diaphragms to Applied Pressure
| العنوان: | Mechanical Response of Silicon MEMS Diaphragms to Applied Pressure |
|---|---|
| المؤلفون: | Sundaram, P. A., Jean, D. L., Sparks, E. M., Deeds, M. A. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 23(2):356-363 Apr, 2014 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
|---|---|
| DOI: | 10.1109/JMEMS.2013.2279503 |