Pure Bottom-up filling process for efficient TSV metallization

التفاصيل البيبلوغرافية
العنوان: Pure Bottom-up filling process for efficient TSV metallization
المؤلفون: Ma, Li, Ling, Huiqin, Li, Ming, Sun, Jiangyan, Yu, Xianxian, Li, Yanyan
المصدر: 2013 14th International Conference on Electronic Packaging Technology Electronic Packaging Technology (ICEPT), 2013 14th International Conference on. :356-359 Aug, 2013
Relation: 2013 14th International Conference on Electronic Packaging Technology (ICEPT)
قاعدة البيانات: IEEE Xplore Digital Library