The demonstration of D-SMT stressor on Si and Ge n-FinFETs

التفاصيل البيبلوغرافية
العنوان: The demonstration of D-SMT stressor on Si and Ge n-FinFETs
المؤلفون: Liao, M.-H., Chen, P. G., Huang, S. C., Kao, S. C., Hung, C. X., Liu, K. H., Lien, C., Liu, C. Y.
المصدر: 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on. :1-2 Jun, 2014
Relation: 2014 IEEE Symposium on VLSI Technology
قاعدة البيانات: IEEE Xplore Digital Library