Thermal stability of WSi/sub 2/ polycide structures for 1 Gbit DRAMs

التفاصيل البيبلوغرافية
العنوان: Thermal stability of WSi/sub 2/ polycide structures for 1 Gbit DRAMs
المؤلفون: Gambino, J.P., Weybright, M., Faltermeier, J., Domenicucci, A.
المصدر: Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat. No.98EX102) Interconnect technology Interconnect Technology Conference, 1998. Proceedings of the IEEE 1998 International. :259-261 1998
Relation: Proceedings of the IEEE 1998 International Interconnect Technology Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780342852
9780780342859
DOI:10.1109/IITC.1998.704916