مؤتمر
Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers
| العنوان: | Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers |
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| المؤلفون: | Possas, Maira, Rousseau, Lionel, Ghassemi, Farbod, Lissorgues, Gaelle, Scorsone, Emmanuel, Bergonzo, Philippe |
| المصدر: | 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on. :1-5 Apr, 2014 |
| Relation: | 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9782355000287 9782355000294 9782355000270 |
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| DOI: | 10.1109/DTIP.2014.7056658 |