Early effect exposing performance of 28nm HK/MG pMOSFETs under PDA or DPN nitridation treatment

التفاصيل البيبلوغرافية
العنوان:	Early effect exposing performance of 28nm HK/MG pMOSFETs under PDA or DPN nitridation treatment
المؤلفون:	Mu-Chun Wang, Po-Kai Chen, Win-Der Lee, Yi-Hong Yu, Shea-Jue Wang, Fang Hsu, Cheng, Osbert, Huang, LS
المصدر:	2014 IEEE International Conference on Electron Devices and Solid-State Circuits Electron Devices and Solid-State Circuits (EDSSC), 2014 IEEE International Conference on. :1-2 Jun, 2014
Relation:	2014 IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC)
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
ردمك:	9781479923342
DOI:	10.1109/EDSSC.2014.7061116