مؤتمر
Backside and edge cleaning of III–V on Si wafers for contamination free manufacturing
| العنوان: | Backside and edge cleaning of III–V on Si wafers for contamination free manufacturing |
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| المؤلفون: | Vert, Alexey, Orzali, Tommaso, Dyer, Tom, Hill, Richard, Satyavolu, PapaRao, Barth, Edward, Gaylord, Richard, Hu, Shan, Vivekanand, Saikumar, Herman, Joshua, Rana, Uzma, Kaushik, Vidya |
| المصدر: | 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI. :362-366 May, 2015 |
| Relation: | 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479999309 |
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| تدمد: | 10788743 23766697 |
| DOI: | 10.1109/ASMC.2015.7164420 |