مؤتمر
Large dynamic range time domain measurement of Q-factor in MEMS
العنوان: | Large dynamic range time domain measurement of Q-factor in MEMS |
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المؤلفون: | Voigt, S., Freitag, M., Sorger, A., Mehner, J.E. |
المصدر: | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :2180-2183 Jun, 2015 |
Relation: | TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781479989553 |
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تدمد: | 2159547X 21641641 |
DOI: | 10.1109/TRANSDUCERS.2015.7181392 |