Large dynamic range time domain measurement of Q-factor in MEMS

التفاصيل البيبلوغرافية
العنوان: Large dynamic range time domain measurement of Q-factor in MEMS
المؤلفون: Voigt, S., Freitag, M., Sorger, A., Mehner, J.E.
المصدر: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :2180-2183 Jun, 2015
Relation: TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479989553
تدمد:2159547X
21641641
DOI:10.1109/TRANSDUCERS.2015.7181392