مؤتمر
Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology
| العنوان: | Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology |
|---|---|
| المؤلفون: | Xu, Wei, Gao, Bo, Ma, Shenhui, Zhang, Anping, Chiu, Yi, Lee, Yi-Kuen |
| المصدر: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on. :189-192 Jan, 2016 |
| Relation: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781509019731 9781509019724 |
|---|---|
| DOI: | 10.1109/MEMSYS.2016.7421590 |