دورية أكاديمية
Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units
العنوان: | Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units |
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المؤلفون: | Haddad, B.M., Yang, S., Karam, L.J., Ye, J., Patel, N.S., Braun, M.W. |
المصدر: | IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 15(1):145-159 Jan, 2018 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 15455955 15583783 |
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DOI: | 10.1109/TASE.2016.2594288 |