دورية أكاديمية
Principles of wet chemical processing in ULSI microfabrication
| العنوان: | Principles of wet chemical processing in ULSI microfabrication |
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| المؤلفون: | Kikyuama, H., Miki, N., Saka, K., Takano, J., Kawanabe, I., Miyashita, M., Ohmi, T. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 4(1):26-35 Feb, 1991 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/66.75861 |