مؤتمر
Improvement of mim capacitor early breakdown by metal deposition process optimization and ar sputter etch implementation
| العنوان: | Improvement of mim capacitor early breakdown by metal deposition process optimization and ar sputter etch implementation |
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| المؤلفون: | Yeh, C.-T., Chu, S.-M., Yeh, Y.-H., Ting, W.-C., Lu, C.-Y. |
| المصدر: | 2016 e-Manufacturing and Design Collaboration Symposium (eMDC) e-Manufacturing and Design Collaboration Symposium (eMDC), 2016. :1-4 Sep, 2016 |
| Relation: | 2016 e-Manufacturing and Design Collaboration Symposium (eMDC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9789869171526 |
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