Effect of magnetron sputtering (RF and DC) parameters on the TaB2 films structure

التفاصيل البيبلوغرافية
العنوان: Effect of magnetron sputtering (RF and DC) parameters on the TaB2 films structure
المؤلفون: Goncharov, A. A., Zykov, A. V., Shelest, I. V., Yunda, A. N., Yakovin, S. D., Kuznetsov, V. N., Mikhalev, A. D., Buranich, V. V.
المصدر: 2016 International Conference on Nanomaterials: Application & Properties (NAP) Nanomaterials: Application & Properties (NAP), International Conference on. :01PCSI08-1-01PCSI08-4 Sep, 2016
Relation: 2016 International Conference on Nanomaterials: Application & Properties (NAP)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781509025138
DOI:10.1109/NAP.2016.7757265