Change of V-Curve Behavior Depending on Ion Angle Deviation in Channeling Condition

التفاصيل البيبلوغرافية
العنوان:	Change of V-Curve Behavior Depending on Ion Angle Deviation in Channeling Condition
المؤلفون:	Sano, Makoto, Tsukahara, Kazutaka, Kawatsu, Sho, Kawasaki, Yoji, Koike, Masazumi
المصدر:	2016 21st International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2016 21st International Conference on. :1-4 Sep, 2016
Relation:	2016 21st International Conference on Ion Implantation Technology (IIT)
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
ردمك:	9781509020249
DOI:	10.1109/IIT.2016.7882853