مؤتمر
A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry
| العنوان: | A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry |
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| المؤلفون: | Bader, U., Besler, A., Schliesser, J., Dorner, J. |
| المصدر: | 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) Semiconductor manufacturing 99 Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI. :109-112 1999 |
| Relation: | 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780352173 9780780352179 |
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| تدمد: | 10788743 |
| DOI: | 10.1109/ASMC.1999.798193 |