مؤتمر
Atomically controlled processing for Ge CVD epitaxial growth
| العنوان: | Atomically controlled processing for Ge CVD epitaxial growth |
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| المؤلفون: | Murota, Junichi, Yamamoto, Yuji, Costina, Ioan, Tillack, Bernd, Vinh Le Thanh, Loo, Roger, Caymax, Matty |
| المصدر: | 2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) Solid-State and Integrated Circuit Technology (ICSICT), 2016 13th IEEE International Conference on. :317-320 Oct, 2016 |
| Relation: | 2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467397179 9781467397193 9781467397186 |
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| DOI: | 10.1109/ICSICT.2016.7998908 |