مؤتمر
Range studies of aluminum, boron, and nitrogen implants in 4H-SiC
| العنوان: | Range studies of aluminum, boron, and nitrogen implants in 4H-SiC |
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| المؤلفون: | Stief, R., Lucassen, M., Schork, R., Ryssel, H., Holzlein, K.-H., Rupp, R., Stephani, D. |
| المصدر: | 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 2:760-763 vol.2 1998 |
| Relation: | 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078034538X 9780780345386 |
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| DOI: | 10.1109/IIT.1998.813778 |