Study on characteristics of surface acoustic wave based on (110)ScAlN/R-sapphire structrue

التفاصيل البيبلوغرافية
العنوان: Study on characteristics of surface acoustic wave based on (110)ScAlN/R-sapphire structrue
المؤلفون: Xu, Jing, Wang, Yan, Jia, Zhi-jie, Xie, Ying-cai
المصدر: 2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2017 Symposium on. :519-523 Oct, 2017
Relation: 2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538662380
DOI:10.1109/SPAWDA.2017.8340281