Benefits of a thermal drift during atomic layer deposition of Al2O3 for C-Si passivation

التفاصيل البيبلوغرافية
العنوان: Benefits of a thermal drift during atomic layer deposition of Al2O3 for C-Si passivation
المؤلفون: Lebreton, Fabien, Zauner, Andy, Bulkin, Pavel, Silva, Francois, Filonovich, Sergej, i Cabarrocas, Pere Roca
المصدر: 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC) Photovoltaic Specialist Conference (PVSC), 2017 IEEE 44th. :1237-1240 Jun, 2017
Relation: 2017 IEEE 44th Photovoltaic Specialists Conference (PVSC)
قاعدة البيانات: IEEE Xplore Digital Library